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Electron Microscopy Sciences

Calibration Standards, Specimens, and Aids

arrow14SEM Calibration Specimens: Magnification Calibration

arrow14Chessy; Test Specimen

A precise SEM test specimen for most all calibration applications.

The Structure

There are more than 1.6 million gold squares of 1µ size on silicon forming a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10µ. Such checkerboards form larger metric checkerboards of 100 x 100µ - These again form checkerboards of 1 mm square. Finally, such 1mm squares are arranged in the same manner covering a field of 5 mm square.

The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10µ wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31/32 from JENOPTIK.

Applications

Imaging

  • Calibration of SEM magnification in all ranges between 20x and 50,000x.
  • Check of equal scaling in X and Y
  • Check of orthogonality and distortion
  • Resolution test at high magnification on the edges of the gold squares.

Motorized Stages
(especially for use with ESCOSY)

  • Measurement of reproducibility using stored position
  • Calibration of readings in X and Y
  • Calibration of stage orthogonality
  • Measurement of absolute positioning accuracy

Experimental Electron Lithography
(use with attachment ELPHY or PROXY-WRITER)

  • Generation of metric writing fields between 10µ and 5mm square via mark recognition and alignment
  • Measurement of SEM distortion at any magnification via mark recognition on different places 
  • Check of defocusing in outer areas.
79503-01 Chessy Test Specimen  each 1750.00 Add to Cart

arrow14 Particle-Size Standards

Please see listing in TEM and STEM Magnification Calibration Specimens

Article of Interest

Inspecting the SEM While in Operation

Resolution and Gray Level Test Specimens arrow14arrow14