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Electron Microscopy Sciences

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arrow13Evactron® Series Decontaminators and Cleaning Systems

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  • EPset
  • Zephyr25
  • SoftClean
  • Combiclean
 

The Evactron® Plasma Decontaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers improving electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron Decontaminator plasma source can be rack mounted or installed on most vacuum chambers and electron microscopes. A wide range of products and connectors are available to best meet your needs. See the ordering tables for recommendations based on your equipment. Flanges for common brands of equipment are available at the end of the page. If you do not see your brand listed, please contact us for additional options.

Applications

  • Hydrocarbon removal in high vacuum chambers
  • Clean SEMs and FIBs for better imaging
  • Improve resolution contrast and scanning time
  • Achieve pristine vacuum conditions
  • Prepare specimens for artifact-free imaging

Evactron® Model EP™arrow13Evactron® Model EP Plasma Decontaminators

The Evactron® E-Series™ of remote RF plasma cleaners reduces hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system.

Features

  • High cleaning efficiency
  • Small footprint/compact plasma radical source (PRS)
  • Operates at TMP and turbomolecular pressures
  • "Pop" ignition (patent pending)
  • Windows and Android GUI software
  • Desktop controller
  • Fits chambers and load locks
  • Vacuum safety interlock

The Evactron® EP Decontaminator is the latest model in the E-Series cleaning systems. It was designed for:

  • Cleaning high vacuum chambers, SEM/FIB
  • Pre-cleaning of the samples

The Evactron® EP model with instant ignition from any vacuum level brings the user highest cleaning rates at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps.

Technology

  • Energy efficient hollow cathode plasma
  • Flow through gas supply
  • Plasma Radical Source (PRS) design maximizes delivery of radicals to chamber
  • "Pop" ignition of the plasma works at pressures below 100 Pa/750 mTorr
  • Low pressure operation 1-3 Pa/7.5-22.5 mTorr
  • Starts and operates at turbo molecular pump compatible pressures
  • Fixed match provides maximum plasma power transfer

Other Features

  • High reliability at 20 Watts and 13.56 MHz power supply
  • No vacuum gauge needed
  • NW 40 flange standard, CF 2.75 optional
  • Vacuum only operation interlock
  • >100 Å/min cleaning rates
  • Rack mount for system integration
  • Elegant and compact design
  • Windows GUI interface/Android tablet programming compatibility

Ordering Information

Attachment Flange required, sold separately. See below.

91000-11 Evactron® EP Plasma Decontaminator™ + Android For Hitachi 8200 / 4800 Series SEM
Includes:
Plasma Radical Source, Horizontal Configuration, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (12.5ft), System user manual
each 19,000.00 Add to Cart
91000-12 Evactron® EP Plasma Decontaminator™ + Android For JEOL TMP Systems
Includes:
Plasma Radical Source, Horizontal Configuration, 1 cc ignition ballast, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (12.5ft), System user manual
each 19,000.00 Add to Cart
91000-13 Evactron® EP Plasma Decontaminator™ + Android For Zeiss
Includes:
Vertical Plasma Radical Source, Table Top Controller, Cable Set (12.5ft), GUI Programming Software, System user manual
each 19,000.00 Add to Cart

Evactron® Model 25 Zephyr Plasma Decontaminatorarrow13Evactron® Zephyr™ Plasma Decontaminators

The Evactron® Zephyr Decontaminator line was created to accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. They are designed for SEM/FIB systems and offer fast and efficient hydrocarbon removal with no damage to samples or sensitive components.

They offer users
  • Cleaning of SEM/FIB chambers at turbo pressure
  • Shorter cleaning time (increased production, less downtime)
  • One button operation
Evactron® Model 25 Zephyr Plasma Decontaminator
  • Desktop controller
  • SEM/FIB chambers or load locks
  • 2 operating regimes
    • Classic mode (roughing pressures)
    • T-pump mode (turbomolecular pressures)

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers.

The Evactron® Model 25 Zephyr Decontaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.

This model was created for chambers that use turbo molecular pumps (TMPs). It is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures.

Features

  • Clean chambers at turbo pump pressures
  • 5-20 Watts RF power
  • ≥10x improved cleaning rate
  • One button operation
  • 1-50 mTorr operating pressure

Benefits

  • No stress to the turbo molecular pump
  • Safely de-contaminates the chamber without damage to sensitive components
  • Shorter cleaning time, giving increased production with less system down time
  • Cleans chamber while in "pump down"
  • Increased mean free path, yet ion damage free

Ordering Information

Attachment Flange required, sold separately. See below.

91000-10 Evactron® 25 Zephyr Plasma Decontaminator
Includes:
PRS-V, Vertical Plasma Radical, Source with shroud, Desktop controller, cable set
each 24,900.00 Add to Cart

SoftClean EParrow13Evactron® SoftClean™ System

Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves. The Evactron® Decontaminator was developed to clean microscope chambers of their residual H/C contamination.

The Evactron® SoftClean Chamber extends the ability to pre-clean specimens, specimen mounts, and holders with the proven downstream plasma ashing process before examination in the chamber, thus insuring high image quality. The Evactron® SoftClean Chamber can also be used as a specimen storage system, keeping samples in a clean environment.

The downstream plasma process used in the Evactron® SoftClean Chamber is gentle, yet very effective at removing H/C contamination. Sputter etching by other plasma cleaners can damage specimens through exposure to energetic ions and heat.

The Evactron® SoftClean Chamber uses reactive gas radicals to remove H/C from specimen surfaces by chemical etch, preserving critical sample fine structure. This downstream etching process breaks down problematic H/C residues into smaller molecules such as CO2, H2O and CO, which are easily pumped out of the chamber.

Specifications

  • Cleans SEM/TEM samples
  • Cleans TEM grids/sample rods
  • Inert sample storage
  • Just use air for oxygen radicals, or use other gases for alternative plasma processes
  • Easy setup and operation. Preset pressure, power and time settings
  • Can be operated from either front panel or computer interface
  • Optional shroud can cover transducer and valve assembly on the Plasma Radical Source
  • Start cleaning by using chamber vent and evacuation controls
  • Advanced plasma detection logic
  • Cleaning and error logs record history and aid troubleshooting
  • Electronic chassis: 3.5"H x 19"W x 7"D (9 x 23 x 48 cm)
  • RF Power: 5-20 Watts at 13.56 MHz
  • KF 40 vacuum mounting flange, adapter flanges available
  • 90-250 VAC 50/60 Hz input
  • Shipping: 20 lb. (10 kg.)

Features

  • Windows and Android GUI software
  • Optional Safar side loaders (US 8,716,676 B2)
  • Accommodates up to three TEM stage rods

Pump Specifications

  • A dry scroll pump rated at 4 cfm/6.8 m3/h or better.
  • A pump rated at ~8 cfm/13.5 m3/h is preferred.
  • You may need to adapt The KF16 flange on the pump valve to a KF25 flange found on many roughing pumps.
  • Use a roughing line of 2.5cm in diameter or larger.

Ordering Information

Attachment Flange required, sold separately. See below.

91000-15 Evactron® SoftClean EP each 35,950.00 Add to Cart
91000-18 (Optional) TEM Adapter for Jeol each 2,450.00 Add to Cart
91000-19 (Optional) TEM Adapter for FEI each 2,450.00 Add to Cart
91000-20 (Optional) TEM Adapter for Zeiss each 2,450.00 Add to Cart
91000-21 (Optional) TEM Adapter for Hitachi each 2,450.00 Add to Cart

Evactron® CombiClean™ Systemarrow13Evactron® CombiClean™ System

  • Cleans SEM/TEM samples and SEM chambers from one desktop controller
  • Stores samples and parts after cleaning
  • Uses patented Safar TEM side loaders

Decontaminate specimens and columns of SEMs and FIBs. The Evactron® CombiClean™ System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system.

  • Cleans SEM/TEM samples and SEM chambers from one desktop controller
  • Stores samples and parts after cleaning
  • Uses patented Safar TEM side loaders

Innovative Design

Designed as a complete cleaning solution, the Evactron® CombiClean System features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron® in-situ cleaning of E-beam instruments such as SEMs, FIBs, and other analytic instruments, by removing carbon contamination.

The system monitors operation of either PRS unit, has internal memory, and is designed for routine operation with minimal operator training. Onboard control allows for changing the cleaning modes between external and internal PRS with just the flip of a switch.

This system is compatible with rotary vane pumps without the worry of oil backstreaming. A dry nitrogen purge feature keeps specimens clean after a plasma cleaning, and a storage mode allows you to continue dry nitrogen purging a sample while the external PRS is in use.

Specifications

The system features a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani gauge.

The microprocessor also regulates the RF power, has a clock to time the downstream plasma cleaning and nitrogen purging cycles, and records the operational and fault log.

Cleaning with the Evactron® CombiClean System may be setup from either the front panel or a remote computer.

  • VentDetect™ Technology
  • Compatible with rotary vane pumps without the worry of oil backstreaming
  • Dry Nitrogen purge feature keeps specimens clean after plasma cleaning
  • Storage mode allows continued dry nitrogen purging of samples while external PRS is in use
  • System monitors operation of either PRS unit
  • Onboard control allows for cleaning modes between internal and external PRS with just the flip of a switch
  • Wide Pressure Range

Pump Specifications

  • A dry scroll pump rated at 4 cfm/6.8 m3/h or better.
  • A pump rated at ~8 cfm/13.5 m3/h is preferred.
  • You may need to adapt the KF16 flange on the pump valve to a KF25 flange found on many roughing pumps.
  • Use a roughing line of 2.5cm in diameter or larger.

Ordering Information

Attachment Flange required, sold separately. See below.

91000-17 Evactron® CombiClean™ System each 59,200.00 Add to Cart
91000-22 (Optional) TEM Adapter for JEOL Sample Rod each 2,450.00 Add to Cart
91000-23 (Optional) TEM Adapter for Hitachi Sample Rod each 2,450.00 Add to Cart
91000-24 (Optional) TEM Adapter for FEI Sample Rod each 2,450.00 Add to Cart
91000-25 (Optional) Evactron PRS-Z (shrouded, vertical configuration) each 10,000.00 Add to Cart
91000-26 (Optional) Evactron Cable Bundle (22.5ft/6.0m) each 900.00 Add to Cart

arrow13Evactron® Adapter Flanges

Evactron® Flanges are identified by physical dimensions of the blank plate in the SEM/FIB. O Rings measured by inner diameter. All measurements in mm. Arranged by equipment brand to which flange commonly connects. Please contact Electron Microscopy Sciences for additional flanges.

230090-01 FEI 64 X 80, 50 ORID, 4H, OCTG, ASYM each 1,480.00 Add to Cart
230141-01 FEI 100 OD, 75 ORID, 6H each 1,480.00 Add to Cart
230142-01 FEI 100 OD, 72 ORID, 88 BC, 3H each 1,480.00 Add to Cart
230143-01 FEI 90 OD, 60 ORID, 78BC, 3H each 1,480.00 Add to Cart
230153-01 FEI 85 OD, 60 ORID, 76 BC, 3H each 1,480.00 Add to Cart
230154-01 FEI 100 OD, 70 ORID 84.5 BC, 3H each 1,480.00 Add to Cart
230155-01 FEI

64 OD, 38 ORID, 57 BC, 4H

each 1,480.00 Add to Cart
230235-01 FEI 70 OD, 33 ORID, 61 BC, 4H, PLUG, 1 PC. each 1,480.00 Add to Cart
230335-01 FEI 87 OD, 60 ORID, 74 BC, 3H each 1,480.00 Add to Cart
230350-01 FEI 120 OD, 93 ORID, 109 BC, 6H each 1,480.00 Add to Cart
230351-00 FEI 59 OD, 38 ORID, 52 BC, 4H, 1 PC. each 1,480.00 Add to Cart
230359-01 FEI 90 OD, 70 ORID, 80 BC, 3H each 1,480.00 Add to Cart
230006-01 HITACHI 57 OD, 34.5 ORID, 50 BC, 4H each 1,480.00 Add to Cart
230320-01 HITACHI 58 X 58, 24 ORID, 41.5 BC, 4H, PLUG, 1 PC. each 1,480.00 Add to Cart
230568-01 HITACHI 69 OD, 47.5 ORID, 4H each 1,480.00 Add to Cart
230001-01 JEOL 64 OD, 40 ORID, 55 BC, 4H each 1,480.00 Add to Cart
230002-01 JEOL 99 OD , 75 ORID, 89 BC, 4H, 38 (1.5") LONG NIPPLE each 1,480.00 Add to Cart
230002-02 JEOL 99 OD, 75 ORID, 89 BC, 4H, 64 (2.5") LONG NIPPLE each 1,480.00 Add to Cart
230003-01 JEOL 86 X 206, NO O-RING, 4H ASYM each 1,480.00 Add to Cart
230010-01 JEOL 73 OD, 50 ORID, 64 BC, 4H each 1,480.00 Add to Cart
230011-01 JEOL 74 X 90, OVAL O-RING, 4H, ASYM each 1,480.00 Add to Cart
230013-01 JEOL 88 OD, 45 ORID,79 BC, 4H, ASYM, 90 LONG NIPPLE each 1,480.00 Add to Cart
230022-01 JEOL 100 X 355, NO O-RING, 5H, ASYM each 1,480.00 Add to Cart
230023-01 JEOL 72 X 86, OVAL O-RING, 4H, ASYM each 1,480.00 Add to Cart
230311-01 JEOL 88 OD, 45 ORID, 79 BC, 4H, ASYM each 1,480.00 Add to Cart
230322-01 JEOL 75 X 98 (ARCHED, ONE SIDE), OVAL O-RING, 4H, ASYM each 1,480.00 Add to Cart
230325-01 JEOL 154 X 204, RECT O-RING, 4H, ASYM each 1,480.00 Add to Cart
230664-01 JEOL 95 OD, 71.5 ORID, 85.5 BC, 3H each 1,480.00 Add to Cart
230008-01 ZEISS 55 OD, 30 ORID, 45 BC, 4H each 1,480.00 Add to Cart
230012-01 ZEISS 64 X 64, 54 ORID, 57 BC, 4H each 1,480.00 Add to Cart
230014-01 ZEISS 79 OD, 53 ORID, 70.5 BC 4H each 1,480.00 Add to Cart
230015-01 ZEISS 84 OD, 54 ORID, 72 BC, 4H each 1,480.00 Add to Cart
230016-01 ZEISS 70 OD, 45 ORID, 57 BC, 4H each 1,480.00 Add to Cart
230017-01 ZEISS 113.5 OD, 46.5 ORID, 92 BC, 4H each 1,480.00 Add to Cart
230018-01 ZEISS 64 OD, 38 ORID, 57 BC, 4H each 1,480.00 Add to Cart
230020-01 ZEISS 82 OD, 41 ORID, 68 BC, 4H, PLUG each 1,480.00 Add to Cart
230034-01 ZEISS 96 OD, 72 ORID, 86 BC, 4H, ASYM each 1,480.00 Add to Cart
230036-01 ZEISS 62 X 62, 53 ORID, 71 BC, 4H each 1,480.00 Add to Cart
230037-01 ZEISS 162 OD, 127 ORID, 149 BC, 6H each 1,480.00 Add to Cart
230038-01 ZEISS 68 X 88, OVAL O-RING, 4H, SYMM each 1,480.00 Add to Cart
230039-01 ZEISS 89 X 89, 72 ORID, 92 BC, 4H each 1,480.00 Add to Cart
230356-01 ZEISS 100 OD, 60 ORID, 90 BC, 6H each 1,480.00 Add to Cart
230357-01 ZEISS 90 OD, 66 ORID, 81 BC, 4H, ASYM each 1,480.00 Add to Cart
230358-01 ZEISS 81 X 85, 4H, ASYM each 1,480.00 Add to Cart
230364-01 ZEISS 85 x 85, 70 ORID, 92 BC, 4H each 1,480.00 Add to Cart
230366-01 ZEISS 150 X 190, RECT. O-RING, 10H, ASYM each 1,480.00 Add to Cart

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