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Electron Microscopy Sciences

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arrow13EMS150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box

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offer

Buy a new unit today and get a $500 credit towards the purchase of any accessories we offer.

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The EMS150 GB is a modular glove box version of the highly successful EMS150T ES bench top turbomolecular-pumped coating system – suitable for SEM, TEM and many thin-film applications. The EMS150 GB comes as standard with sputtering and carbon rod evaporation inserts and a rotating specimen stage. Options include metal evaporation, glow discharge, film thickness measurement and special stages to suit a range of specimen types.

Key Features

  • Modular construction for mounting in glove boxes
  • Integral glove box pressure monitoring
  • Remote operation from a touch screen control panel
  • Metal sputtering and carbon evaporation in one system
  • High vacuum turbo pumping – allows sputtering of a wide range oxidizing and non-oxidizing (noble) metals
  • High vacuum carbon rod coating – ideal for SEM and TEM carbon coating applications (carbon fiber available as an option)
  • Vacuum shut down feature – leaves the process chamber under vacuum when not in use, improved vacuum performance
  • Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
  • Integral pressure interlock switch – automatically turn off pumping if pressure becomes too high
  • Three-year warranty

Product Description

Based on the market-leading EMS150T coater, the EMS150 GB is single platform for both sputtering and carbon rod evaporation. Metal evaporation using filament or boat sources is also possible using an optional insert.

Depending upon user preference, the EMS150 GB can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), or a high vacuum carbon coater suitable for SEM and transmission electron microscopy (TEM). The flexibility of the EMS150 GB can be further expanded using a range of optional accessories.

The EMS150 GB can sputter both oxidizing and non-oxidizing (noble) metals, making it ideal for many thin film applications.

The EMS150 GB has an integral turbomolecular pump and additionally requires a suitable rotary pump or dry pump to "back" the turbomolecular pump. See Ordering Information for more details.

Flexible modular design

A modular design enables the vacuum chamber to be mounted through the base of the glove box or – when modification to the glove box floor is not possible – inside the glove box itself (optional feedthroughs are required).

A separate power supply housed in a rugged case is designed to be floor-mounted and can be positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.

Options for glove box mounting:
  1. Vacuum module mounted in the floor of the glove box

    A cut-out is made in the floor of the glove box and the vacuum chamber fitted and sealed with the gasket supplied. External connections from the floor-mounted power supply, vacuum pump and argon gas can then be made directly to the chamber.

  2. OR

  3. Vacuum module placed inside the glove box

    The chamber assembly is placed inside the glove box and the power supply, vacuum pump and argon gas connections are made through two KF40 feedthroughs in the rear of the glove box.

Note: Each EMS150 GB can be supplied with a basic accessory/configuration kit to suit either internally or externally mounted vacuum chambers. For this option please order the connection kit. Additional kits can be designed on a case-by-case basis to allow the EMS150 GB to be adapted to various manufacturers' glove boxes. Please contact us for further details.

Touch screen user interface – rapid data entry

Enclosed in a stainless steel case and mounted at a convenient position outside the glove box, the touch screen allows multiple users to input and store coating protocols.

At the operational heart of EMS150 GB is the touch screen controller, which allows the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and evaporation profiles are provided.

Vacuum module – including "vacuum shutdown" and glove box pressure interlock

The vacuum module houses all the working components, including the 70 L/s air-cooled turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full-range active gauge is fitted as standard to monitor the vacuum.

The EMS150 GB includes "vacuum shutdown", a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.

A unique feature of the EMS150 GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and turns off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.

The vacuum chamber is 214 mm high to allow for increased source-to-substrate distances required for coating large specimens. It has an external diameter of 165 mm and comes with an integral implosion guard. The chamber assembly is easy to remove to allow specimen exchange and chamber cleaning.

A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190 mm above the base plate. Other stages are available as options.

Sputter coating and carbon coating as standard, plus an option for metal evaporation

Quick-change deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.

High resolution sputter coating

The EMS150 GB features a high-resolution sputter coater insert (3200) for oxidizing and non-oxidizing (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium (Cr), which are highly recommended for FE-SEM applications. Please see Ordering Information for details of available metal targets.

Carbon rod evaporation

The high vacuum carbon rod coating insert (3230) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The EMS150 GB uses economical 3.05 mm diameter carbon rods, and the advanced "anti-stick" carbon rod evaporation gun offers simple operation and reproducible results.

A carbon fiber evaporation insert (3250) is available as an option (see Options and Accessories).

Controlled ramped carbon rod evaporation

This comes as standard with E and ES models and has two important benefits. Careful control of evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). In addition, the quality of the resulting carbon films is enhanced by the eradication of "sparking" – a common and unwanted feature of less advanced coating systems.

Controlled pulse carbon cord evaporation

If the optional carbon fiber insert (for E and ES models) is fitted, then controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces the amount of debris (including large carbon fragments) associated with traditional carbon "flash" evaporation. Also, it allows the carbon cord evaporation process to be accurately controlled using the optional film thickness monitor (FTM) accessory.

Metal evaporation/aperture cleaning option

A quick-change insert (3260) allows metal evaporation from tungsten baskets or molybedenum boats – ideal for thin film applications. For ease of set up in a glove box, the metal charge can be loaded into the evaporation source away from the vacuum chamber.

Each of the above configurations can be used with a range of optional accessories. For further details, see Additional Information.

Options and Accessories

The EMS150 GB has an extensive range of other options and accessories, including a glow discharge insert, film thickness monitor (FTM) and specimens stages to suit most applications. For details, see Additional Information.

Additional Information

EMS150 GB Options and Accessories

A range of interchangeable, plug-in style coating head inserts are available:

  • Sputtering head insert (3200): Suitable for oxidizing and non-oxidizing (noble) metals. Supplied with a 54 mm Ø x 0.3 mm thick chromium (Cr) target as standard. For additional targets, see Ordering Information.
    Note: changing sputtering targets is easy, but additional sputter head inserts (3210) can be purchased for a quicker coating material change
  • Carbon rod evaporation head insert and accessories for 3.05 mm Ø rods (3230)
Optional coating inserts
  • Carbon rod evaporation head insert for 6.15 mm Ø rods (3240).
  • Carbon fiber evaporation head insert (3250)
  • Metal evaporation and aperture cleaning head insert (3260). Using tungsten wire baskets and molybdenum boats. Includes electrode extensions to allow upwards evaporation, if required. Note that when the electrodes are fitted, some stage options cannot be used
  • Glow discharge insert (4513). Used to modify surface properties, e.g. hydrophobic-hydrophilic conversion. (R S and R ES versions only). Can be retrofitted.
Specimen stages

The EMS150 GB has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

  • 6800-S rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment.
  • 6801 rotate-tilt stage, 50 mm Ø with height adjustment. Target to stage height variable between 37 mm and 60 mm. The tilt angle can be preset.
  • 6803 variable angle rotary planetary specimen stage. 50 mm Ø specimen platform with six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs.
  • 3360 flat rotation stage for 4"/100 mm wafers. Includes gear box which needs to be fitted when the optional FTM is being used, or for coating over the full area of the stage.
  • 6804 rotation stage for glass microscope slides. Allows two 75 mm x 25 mm slides to be coated.

All rotation stages have rotation speeds that can be variable between 8 and 20 rpm.

Other options, including FTM and glow discharge
  • 3270 extended height chamber. 87 mm higher than the standard stage – useful for tall specimens.
  • 3290 Film Thickness Monitor (FTM). Consists of a controller and quartz crystal oscillator built into the EMS150 GB and a vacuum feed through, chamber mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This modification is used to measure and control the thickness of material deposited.
  • 4513 glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion).

Specifications

Vacuum module size 267 mm W x 490 mm D x 494 mm H, total height with coating head open is 767 mm
Power supply size 310 mm W x 357 mm D x 262 mm H
User interface size & weight 160 mm W x 157 mm D x 42 mm
Weight: 40 kg
Packed dimensions 725 mm W x 660 mm D x 787 mm H (44 kg)
Work chamber Borosilicate glass 152 mm Ø (inside) x 214 mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145 mm 320 x 240 color graphic TFT (Thin Film Transistor) display
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due.
Sputtering target Disc-style 57 mm Ø x 0.3 mm thick chromium (Cr) target is fitted as standard
Specimen stage 60 mm Ø rotation stage. Rotation speed 8 ~ 20 rpm
Specimen shutter An automatic shutter is fitted as standard to shield specimens during pre-sputtering of oxidizing metals and protection during evaporation out-gassing procedures.
Vacuum Internally mounted, 70 L/s air-cooled turbomolecular pump.
Rotary pump 5m3/hr Pfeiffer DUO 6 two-stage rotary pump with oil mist filter. (Order separately: 91003)
Vacuum measurement An active, full-range gauge is fitted
Typical ultimate vacuum 5 x 10-5mbar
Sputter vacuum range Between 5 x 10-3 and 5 x 10-1mbar
Interlocks The EMS150 GB is interlocked to prevent continuous pumping of the glove box in the event of a vacuum leak
Processes
Sputtering 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without breaking vacuum and with rest periods automatically built into the process).
Carbon evaporation A robust, ripple free, D.C. power supply, featuring pulse evaporation, ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-70 A.
Metal evaporation and aperture cleaning insert (option) For thermal evaporation of metals from filaments or molybdenum boat can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times is up to four minutes.
Services and other information
Gases Argon sputtering process gas 99.999% ("zero grade").
Nitrogen venting gas uses the glove box atmosphere as the source.
Electrical supply 90-250 V ~ 50/60 Hz 1400 VA including rotary pump. 110/240V voltage selectable.
Conformity Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, resulting in reduced running costs

Ordering Information

offer Buy a new unit today and get a $500 credit towards the purchase of any accessories we offer.
EMS150 GB A modular, high resolution turbomolecular-pumped sputter coater/carbon rod evaporator for glove boxes. Includes:
sputtering insert, 54 mm Ø x 0.3 mm chromium (Cr) target, carbon rod evaporation insert, carbon rods (3.05 mm Ø x 300 mm) and carbon rod shaper (manual operation). Fitted with a rotation stage
POR Quote
Rotary pump requirements (needs to be ordered separately)
91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 2,429.00 Add to Cart
6550-A Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter POR Quote
Options and Accessories
3230 Carbon rod evaporation head insert (for 3.05 mm Ø rods) POR Quote
3240 Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical POR Quote
3250 Carbon fiber evaporation head insert POR Quote
3260 Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards. Supplied with a pack of ten tungsten filaments and a molybdenum boat. POR Quote
3270 Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens POR Quote
3290 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited POR Quote
3300 Spare quartz crystal. 95.00 Add to cart
3320 Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) POR Quote
4513 Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues POR Quote
3600 Metal evaporation basket – pack of 10 (for use with metal evaporation head) POR Quote
3630 Two-year spares kit for EMS150 GB
Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings
POR Quote
Specimen stages
6790-S Swinging arm stage drive, a stage drive and positioning mechanism which positions the stage under the correct target. Also provides rotation drive to the stage. Rotation Speed Max 38 rpm Min 14 rpm POR Quote
6800-S Rotating specimen stage for 6" (152 mm) wafers, with rotation variable between preset limits. POR Quote
6801 Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or ⅛" pin stubs. The stage rotation speed is variable between preset limits. The target to stage height is variable between 0 mm and 42 mm for the standard stage. When used with the extended height cylinder the target to stage height would be an additional 87 mm. POR Quote
6802 50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or ⅛" pin stubs. Stage rotation speed variable between preset limits. Note: Target to stage height is variable between 10 mm and 53 mm for the standard stage. The stage is supplied with two mounting pillars; one provides 10 mm to 32 mm target to stage distance and the other 31 mm to 53 mm. An adjustable stop is used to set the height. When used with the extended height cylinder (optional accessory) the target to stage height would be an additional 87 mm. POR Quote
6803 50 mm Ø rotary tilting stage. A rotary planetary style stage with a variable tilt angle from horizontal to 30 degrees. The platform has six positions for either 6.5 mm, 10 mm and 15 mm disc stubs or ⅛" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder. POR Quote
6804 A 90 mm Ø specimen stage for glass microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six ⅛" SEM pin stubs. The stage rotation speed is variable between preset limits. A gear box is included to allow the optional FTM to be used. POR Quote
msdsCarbon supplies
3500 Carbon rods, 6.15 mm Ø x 100 mm length (unshaped) 10/pk POR Quote
3510 Carbon rods, 6.15 mm Ø x 50 mm length (shaped) 10/pk POR Quote
3520 Carbon rods, 3.05 mm Ø x 50 mm length (shaped) 10/pk POR Quote
3530 Carbon rods, 3.05 mm Ø x 300 mm length (unshaped) 10/pk POR Quote
3540 Carbon fiber cord – high purity – 1m POR Quote
3550 Carbon fiber cord – high purity – 5m POR Quote
3560 Carbon fiber cord – standard grade – 1m POR Quote
3570 Carbon fiber cord – standard grade – 10m POR Quote
3580 Carbon fiber cord – standard grade – 100m POR Quote
3590 Manual rod shaper for 6.15 mm Ø carbon rods POR Quote
3595 Manual rod shaper for 3.05 mm Ø carbon rods POR Quote
Sputter Targets

The EMS150 GB is fitted as standard with a 0.2 mm thick chromium (Cr) sputtering target. Other optional targets:

3410 57 mm Ø x 0.1 mm Gold POR Quote
3411 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
3412 57 mm Ø x 0.1 mm Platinum POR Quote
3413 57 mm Ø x 0.1 mm Nickel POR Quote
3414 57 mm Ø x 0.1 mm Silver POR Quote
3415 57 mm Ø x 0.1 mm Palladium POR Quote
3416 57 mm Ø x 0.1 mm Copper POR Quote
3417 57 mm Ø x 0.3 mm Chromium POR Quote
3418 57 mm Ø x 0.5 mm Tungsten POR Quote
3419 57 mm Ø x 1.5 mm Chromium POR Quote
3420 57 mm Ø x 0.2 mm Tungsten POR Quote
3421 54 mm Ø x 1.5 mm Carbon POR Quote
3422 57 mm Ø x 0.1 mm Aluminium POR Quote
3423 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
3424 57 mm Ø x 1.5 mm Titanium POR Quote
3425 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote
3426 57 mm Ø x 0.3 mm Gold POR Quote
3427 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
3428 57 mm Ø x 0.3 mm Platinum POR Quote
3429 57 mm Ø x 0.5 mm Titanium POR Quote
3430 57 mm Ø x 0.1 mm Iron POR Quote
3431 57 mm Ø x 0.3 mm Iridium POR Quote
3432 57 mm Ø x 0.1 mm Cobalt POR Quote
3433 57 mm Ø x 0.1 mm Tin POR Quote
3434 57 mm Ø x 0.1 mm Molybdenum POR Quote
3435 57 mm Ø x 0.3 mm Magnesium POR Quote
3436 57 mm Ø x 0.1 mm Tantalum POR Quote
3437 57 mm Ø x 3 mm Indium Tin Oxide (90/10) POR Quote

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