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arrow13Turbo-Pumped Sputter and Carbon Coater

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arrow14EMS150T Turbo-Pumped Sputter Coater/Carbon Coater

The EMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both – in a single easy-to-use system. Other options include metal evaporation and aperture cleaning.

Turbo Pumped Sputter Coater Carbon Coater

EMS150T S – a high resolution sputter coater, suitable for oxidizing and non-oxidizing (noble) metals

EMS150T E – a high vacuum carbon coater for SEM and TEM applications

EMS150T ES – a high resolution sputter coater and high vacuum carbon evaporator

Key Features

  • Metal sputtering or carbon evaporation, or both – combined in one space-saving design
  • Fine grain sputtering – ideal for high resolution FE-SEM
  • High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing (noble) metals – suitable for W-SEM, FE-SEM and also for many thin film applications
  • High vacuum carbon coating – ideal for SEM and TEM carbon coating
  • Controlled ramped carbon rod evaporation – precise control and superior carbon films
  • Pulsed or ramped carbon coating modes – ramped evaporation can be selected for enhanced control and reproducibility of deposited carbon
  • Glow discharge, metal evaporation and aperture cleaning options
  • Fully automatic touch screen control – rapid data input, simple operation
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Vacuum shut-down feature – leaves the process chamber under vacuum when not in use to give improved vacuum performance
  • Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum (rest periods automatically built in)
  • Three-year warranty

Ideal for SEM, high resolution FE-SEM and TEM applications

EMS150T closeupEMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.

The ability of the EMS150T to sputter a wide selection of oxidizing and non-oxidizing (noble) metals also makes it an ideal platform for many thin film applications.

Metal evaporation and aperture cleaning insert options are available.

Touch screen control and turbo pumping

The EMS150T is presented in a custom-molded, one-piece case – allowing easy servicing access. The color touch screen allows multiple users to input and store coating 'recipes'.

The case houses all the working components, including the efficient 70 L/s air-cooled turbomolecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an internal diameter of 165 mm/6" and comes with an integral implosion guard. The EMS150T also includes 'vacuum shutdown', which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.

A variable speed rotary specimen stage is fitted as standard, with other stages available as options. For further details, see Additional Information.

Sputter coating, carbon coating or both

There are three different formats of the EMS150T:

  • EMS150T S – a high resolution sputter coater for oxidizing and non-oxidizing (noble) metals. A wide selection of sputtering targets is available, including iridium (Ir) and chromium (Cr), which are highly recommended for FE-SEM applications.
  • EMS150T E – a high vacuum carbon coater, ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical, high purity 3.05 mm Ø carbon rods.
  • EMS150T ES – a combined system for both sputtering and carbon coating. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognizes which head is in place and displays the appropriate operating settings.

Each of the above can be fitted with a range of optional accessories (metal evaporation, carbon fiber evaporation coating, film thickness monitor, etc.). For further details, see Additional Information.

EMS 150T touch screenRapid data entry

At the operational heart of the EMS150T is a simple color touch screen which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience, a number of typical sputtering and evaporation profiles are already stored.

Carbon coating – pulsed or ramped evaporation mode (EMS150T ES and EMS150T E)

Controlled pulse carbon cord evaporation

Installed as standard on E and ES models, this profile ensures that carbon is evaporated in controlled short pulses. This significantly reduces the amount of debris (large carbon fragments) associated with traditional carbon "flash" evaporation. Also, it allows the carbon cord evaporation process to be accurately controlled using the optional film thickness monitor (FTM) accessory.

Controlled ramped carbon rod evaporation

This has two important benefits. Careful control of evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). In addition, the quality of the resulting carbon films is enhanced by the eradication of "sparking" that is a common feature of less advanced coating systems.

Pulsed Cleaning for aluminum sputtering

Aluminium (Al) can be more difficult to coat due to its fast oxidizing properties. Oxide layers can be difficult to remove, but the EMS150T ES and EMS150T S include special on-board profiles for aluminium (Al) that reduce the oxide removal time and prevent excessive pre-sputtering of the already clean target.

Pumping requirement

A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. Dry pumping alternatives are also available. See Ordering Information for more details.

Options and Accessories

The EMS150T has an extensive range of options and accessories, including a glow discharge insert, film thickness monitor (FTM) and specimens stages to suit most applications. For details, see Additional Information.

Glow Discharge Attachment

The primary application of glow discharge is a technique for the surface modification or wetting of newly evaporated transmission electron microscopy (TEM) carbon support films.

Hydrophilization

Freshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, thus allowing easy spreading of aqueous suspensions. With a subsequent magnesium acetate treatment, the surface is made hydrophilic and positively charged. In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional adsorption of selected biomolecules.

Coating head options

A range of interchangeable, plug-in style coating head inserts are available.

Sputtering head insert. Suitable for oxidizing and non-oxidizing (noble) metals. Supplied with a 57 mm Ø x 0.3 mm thick chromium (Cr) target as standard. For additional targets, see Ordering Information.

Additional sputter head insert. Available for quick change of coating material (T S and T ES versions only).

Carbon rod evaporation head insert (for 3.05 mm Ø rods).

Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note: 3.05 mm Ø rods are recommended, as they offer greater process control and are more economical (less wastage).

Carbon fiber evaporation head insert.

Metal evaporation and aperture cleaning head insert. Features include the ability to evaporate upwards or downwards (T E and T ES versions only).

Specimen stages

The EMS150T has specimen stages to meet most requirements. All are easy-to-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage):

Rotation stage: 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment.

Rotate-tilt stage: 50 mm Ø with height adjustment (target to stage height variable between 37 mm and 60 mm). The tilt angle can be preset.

Variable angle rotary planetary stage: with 50 mm Ø specimen platform.

Large flat rotation stage: for 4"/100 mm wafers.

Rotation stage for glass microscope slides.

Other options

Standard coating shield assembly

Extended height coating shield assembly

Film thickness monitor (FTM). The optional FTM attachment (6556) consists of a controller and quartz crystal oscillator built into the EMS150T, and a vacuum feedthrough, chamber-mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This modification is used to measure and control the thickness of material deposited.

Full range vacuum gauge: for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard).

Tilt Rotation Stage Tilt Rotation Stage Metal Evaporation Insert
Tilt Rotation Stage and FTM Carbon Rod Evaporation Insert Metal Evaporation insert

Specifications

Instrument Case 585 mm W x 470 mm D x 410 mm H, total height with coating head open is 650 mm
Weight 33.4 kg
Packed dimensions 725 mm W x 660 mm D x 680 mm H (42 kg)
Work chamber Borosilicate Glass 150 mm ID x 127 mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145 mm 320 mm x 240 mm color graphic thin film transistor (TFT) display
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out (then it overwrites itself) and reminders for when maintenance is due.
Sputter target Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. T S and T ES versions only.
Vacuum
Turbomolecular pump Internally-mounted 70 L/s air-cooled turbomolecular pump
Rotary pump 5m3/hr two-stage rotary pump with oil mist filter
Vacuum measurement Pirani gauge as standard. A full range gauge is available as an option
Typical ultimate vacuum 5 x 10-3mbar
Sputter vacuum range Between 5 x 10-3 and 5 x 10-1 mbar
Specimen stage 50 mm Ø rotation stage with rotation speed of 8-20 rpm. For alternative stages, see Ordering Information
Processes
Sputtering 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without breaking vacuum and with automatically built-in rest periods).
Carbon evaporation A robust, ripple free DC power supply, featuring pulse evaporation, ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-70 A.
Metal evaporation and aperture cleaning insert Option
For thermal evaporation of metals from filaments or boats For cleaning SEM or TEM apertures, a standard molybdenum boat (supplied) can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times can be up to four minutes.
Services and other information
Gases Argon sputtering process gas, 99.999% (TS and T ES versions)
Nitrogen venting gas (optional)
Electrical supply 90-250 V 50/60 Hz 1,400 VA including rotary pump. 110/240 V voltage selectable
Conformity Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, resulting in reduced running costs

Ordering Information

3390 EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05 mm Ø carbon rods. Supplied with carbon rods (3.05 mm Ø x 300 mm) and a carbon rod shaper (manual operation) POR Quote
3380 EMS150T S – High resolution turbomolecular pumped sputter coater, including a 54 mm Ø x 0.3 mm chromium (Cr) target POR Quote
3400 EMS150T ES – High-resolution turbomolecular pumped sputter coater, including a 57 mm Ø x 0.3 mm chromium (Cr) target and high vacuum carbon rod evaporation coater for 3.05 mm Ø carbon rods. POR Quote

Rotary pump requirements (needs to be ordered separately):

91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 2,429.00 Add to Cart

Options and Accessories

Including details of coating head inserts and specimen stages that are fitted as standard

Tilt Angle Stage Rotary Planetary Stage 4 Glass Microscope Stage Carbon Evaporation Insert
Tilt Angle Stage Rotary Planetary Stage 4" Wafer Stage Glass Microscope Stage Carbon Evaporation Insert
Coating head options

A range of interchangeable, plug-in style coating head inserts are available:

3200 Sputtering head insert suitable for oxidizing and non-xidizing metals. Supplied with a 54 mm x 0.3 mm thick chromium (Cr) target as standard. For additional targets see Sputtering Targets section POR Quote
3210 Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. POR Quote
3230 Carbon rod evaporation head insert (for 3.05 mm Ø rods) POR Quote
3240 Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical (less wastage). POR Quote
3250 Carbon fiber evaporation head insert POR Quote
3260 Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES
versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat.
POR Quote
3270 Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens POR Quote
3280 Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited POR Quote
3290 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited POR Quote
3300 Spare quartz crystal for FTM. 95.00 Add to cart
3320 Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) POR Quote
4513 Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted POR Quote
Specimen stages

The EMS150T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):

3330 Rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment POR Quote
3340 Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Tilt angle can be preset. 50 mm Ø specimen platform with six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
3350 Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
3360 Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm POR Quote
3370 Rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used POR Quote
Sputtering Targets

The EMS150T S and EMS150T ES are fitted as standard with a 0.3 mm thick chromium (Cr) sputter target. Other optional targets:

3410 57 mm Ø x 0.1 mm Gold POR Quote
3411 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
3412 57 mm Ø x 0.1 mm Platinum POR Quote
3413 57 mm Ø x 0.1 mm Nickel POR Quote
3414 57 mm Ø x 0.1 mm Silver POR Quote
3415 57 mm Ø x 0.1 mm Palladium POR Quote
3416 57 mm Ø x 0.1 mm Copper POR Quote
3417 57 mm Ø x 0.3 mm Chromium POR Quote
3418 57 mm Ø x 0.5 mm Tungsten POR Quote
3419 57 mm Ø x 1.5 mm Chromium POR Quote
3420 57 mm Ø x 0.2 mm Tungsten POR Quote
3421 54 mm Ø x 1.5 mm Carbon POR Quote
3422 57 mm Ø x 0.1 mm Aluminium POR Quote
3423 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
3424 57 mm Ø x 1.5 mm Titanium POR Quote
3425 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote
3426 57 mm Ø x 0.3 mm Gold POR Quote
3427 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
3428 57 mm Ø x 0.3 mm Platinum POR Quote
3429 57 mm Ø x 0.5 mm Titanium POR Quote
3430 57 mm Ø x 0.1 mm Iron POR Quote
3431 57 mm Ø x 0.3 mm Iridium POR Quote
3432 57 mm Ø x 0.1 mm Cobalt POR Quote
3433 57 mm Ø x 0.1 mm Tin POR Quote
3434 57 mm Ø x 0.1 mm Molybdenum POR Quote
3435 57 mm Ø x 0.3 mm Magnesium POR Quote
3436 57 mm Ø x 0.1 mm Tantalum POR Quote
3437 57 mm Ø x 3 mm Indium Tin Oxide (90/10) POR Quote
msdsCarbon supplies
3500 Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) pack of 10 POR Quote
3510 Carbon rods – 6.15 mm Ø x 50 mm length (shaped) pack of 10 POR Quote
3520 Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10 POR Quote
3530 Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10 POR Quote
3540 Carbon fiber cord – high purity – 1m POR Quote
3550 Carbon fiber cord – high purity – 5m POR Quote
3560 Carbon fiber cord – standard grade – 1m POR Quote
3570 Carbon fiber cord – standard grade – 10m POR Quote
3580 Carbon fiber cord – standard grade – 100m POR Quote
3590 Manual rod shaper for 6.15 mm Ø carbon rods POR Quote
3595 Manual rod shaper for 3.05 mm Ø carbon rods POR Quote
Other consumables and spare kits
3600 Metal evaporation basket – pack of 10 (for use with metal evaporation head) POR Quote
3610 Two-year spares kit for EMS150T S
Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, quartz crystals, O-rings
POR Quote
3620 Two-year spares kit for EMS150T E
Includes: chromium (Cr) target, glass cylinder,carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings
POR Quote
3630 Two-year spares kit for EMS150T ES
Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings
POR Quote

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