Silicon Wafers for AFM, STM
Ultra-Flat Silicon Wafers
These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.
Specifications
| 4" | 6" | 8" | |
| Material: | Silicon | Silicon | Silicon |
| Diameter: | 100 mm | 150 mm | 200 mm |
| Orientation: | <100> | <100> | <100> |
| Type/Dopant: | P/Boron | P/Boron | P/Boron |
| Grade: | Prime/CZ Virgin | Prime/CZ Virgin | Prime/CZ Virgin |
| Growth Method: | CZ | CZ | CZ |
| Resistivity: | 10-20 Ohm-cm | 10-20 Ohm-cm | 10-20 Ohm-cm |
| Thickness: | 525µm ±20µm | 675µm ±20µm | 725µm ±20µm |
| TTV: | <4.00µm | <4.00µm | <4.00µm |
| SFPD: | <2.0µm | <2.0µm | <2.0µm |
| Warp: | ≤30µm | ≤30µm | ≤30µm |
| Bow: | ≤30µm | ≤30µm | ≤30µm |
| Particles: | ≤20@≥0.3µm | ≤20@≥0.3µm | ≤20@≥0.3µm |
| Front Surface: | Polished | Polished | Polished |
| Back Surface: | Etched | Etched | Etched |
| Flat: | 2 per SEMI Standard | 1 per SEMI Standard | 2 per SEMI Standard |
| Site Flatness: | <2.0µm | <2.0µm | <2.0µm |
| Roughness: | Typically 2-3Å | Typically 2-3Å | Typically 2-3Å |
Ordering
| 71893-01 | Ultra-Flat Silicon Wafer, 4" | each | 79.50 | Add to Cart |
| 71893-02 | Ultra-Flat Silicon Wafer, 6" | each | 104.00 | Add to Cart |
| 71893-03 | Ultra-Flat Silicon Wafer, 8" | each | 125.00 | Add to Cart |
Silicon Wafers Type P
These silicon wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.
Specifications
| 1" | 2" | 3" | 4" | 6" | |
| Material: | Silicon | Silicon | Silicon | Silicon | Silicon |
| Diameter: | 25 mm | 50 mm | 76 mm | 100 mm | 150 mm |
| Orientation: | <100> | <100> | <111> | <100> | <100> |
| Resistance: | 1-30 Ohms | 1-30 Ohms | 1-30 Ohms | 1-30 Ohms | 1-30 Ohms |
| Type P: | Boron - 1 primary flat | Boron - 1 primary flat | Boron - 1 primary flat | Boron - 1 primary flat | Boron - 1 primary flat |
| SiO2 top coating: | None | None | None | None | None |
| Wafer Thickness: | 10-12 mill (254-304µm) |
9-13 mill (230-330µm) |
13.6-18.5 mill (345-470µm) |
18.7-22.6 mill (475-575µm) |
23.6-25.2 mill (600-690µm) |
| Roughness: | 2nm | 2nm | 2nm | 2nm | 2nm |
| TTV: | <20µm | ||||
| Polished: | on one side | on one side | on one side | on one side | on one side |
Ordering
| 71893-04 | Silicon Wafer Type P, 1" | each | 45.00 | Add to Cart |
| 71893-05 | Silicon Wafer Type P, 2" | each | 25.00 | Add to Cart |
| 71893-06 | Silicon Wafer Type P, 3" | each | 28.00 | Add to Cart |
| 71893-07 | Silicon Wafer Type P, 4" | each | 42.00 | Add to Cart |
| 71893-08 | Silicon Wafer Type P, 6" | each | 57.00 | Add to Cart |
