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Electron Microscopy Sciences

Technical Data Sheets

TEM Window Grid Membrane Strength

EMS Catalog #76042 Series TEM Window Grids

Membrane Window Strength - Differential Pressure Tolerance

Silicon Nitride

All our membrane types and membrane area configurations have been robustness tested by application of differential pressure. In these tests, the membrane was oriented such that differential pressure forced the membrane against the chip frame. In the opposite orientation where the membrane would be delaminated from the chip frame, the pressure tolerance would be several times lower.

All values below are the maximum tolerated differential pressure reported as mean +/- standard deviation (n = 3), in units of PSI.

Window Sizes:

  • 9 Windows: (8) 100x100, (1) 100x350 micron
  • 9 Small Windows: (8) 50x50, (1) 50x350 micron
  • 2 Slots: (2) 50x1500 micron
  • Single Windows: (1) square window of x micron side-length

Pure Silicon Thickness
  5 nm 9 nm 15 nm 30 nm 35 nm
9 Windows   3.90 ± 0.71 11.57 ± 0.26    
9 Small Windows 2.30 ± 0.29        
2 Slots 2.60 ± 0.99 2.53 ± 0.40 14.73 ± 2.61    
Single 25 Micron 35.33 ± 0.78        
Nanoporous - 9 Windows       16.47 ± 0.95  
Nanoporous - Single 500 Micron       3.33 ± 0.17  
Single Crystal - 9 Windows         34.03 ± 1.07
Silicon Nitride Thickness
  5 nm 10 nm 20 nm 50 nm
9 Windows   6.13 ± 2.00 40+ 40+
9 Small Windows 37.30 ± 3.08      
9 Large Windows   11.57 ± 0.66    
2 Slots 6.53 ± 0.24      
Single 25 Micron 40+      
Single 100 Micron       25.13 ± 4.45
Single 500 Micron     9.90 ± 0.36 13.37± 1.25
Single 1000 Micron       7.80 ± 0.29
Microporous - Single 500 Micron     5.37 ± 0.37 10.13 ± 0.52
Nanoporous - Single 500 Micron     5.33 ± 1.39  
Silicon Dioxide Thickness
  20 nm 40 nm 75 nm
9 Windows 11.33 ± 0.37 12.73 ± 0.68  
G-Flat™ Single 1000 Micron     2.93 ± 0.17
X-Ray Windows Thickness
  50 nm 100 nm 200 nm 300 nm
Single 500 Micron 20.47 ± 0.33 24.40 ± 0.99    
Single 1000 Micron 9.67 ± 0.12 13.13 ± 0.09    
Single 1500 Micron     6.97 ± 0.25  
Single 2500 Micron     4.07 ± 0.09  
G-Flat™ Single 500 Micron   5.60 ± 0.29   11.53 ± 0.12
G-Flat™ Single 1000 Micron     2.63 ± 0.05  

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Silicon Nitride TEM Window Grids, Pure Silicon TEM Window Grids, Silicon Dioxide TEM Window Grids, X-Ray Window Grids