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Electron Microscopy Sciences

Technical Data Sheets

Silicone Test Specimen

EMS #79502

Silicon Test SpecimenThe test specimen consists of lines etched into a single crystal silicon substrate, written by electron beam machinery. It consists of a square mesh of course lines of 500µm spacing with 50 intermediate fine lines of 10µm spacings.

The 10µm pitch has been measured using an automatic line width measuring system.


Position

 

Pitch Meas.
µm

1   10.004
2   9.997
3   9.989
4   10.004
5   9.997
6   9.988
7   9.982
8   10.001
9   9.969
10   9.953
11   9.975
12   9.986
13   9.944

Measurement Stats

Max   10.004
Min   9.944
Mean   9.984
Standard Deviation   0.02

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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Silicone Test Specimens