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Electron Microscopy Sciences

Technical Data Sheets

Silicone Test Specimen

EMS Catalog #79502

Date: Jan. 28, 2003

The test specimen consists of lines etched into a single crystal silicon substrate. They have been written by electron beam machinery, and consist of a square mesh of course lines of 500µm spacings with 50 intermediate fine lines of 10µm spacings.

The 10µm pitch has been measured using an automatic line width measuring system. The measurements obtained from wafer number ENG 1148-3 are shown below:

Position
Pitch Measurement µ
1
10.010
2
10.010
3
10.050
4
10.050
5
10.010
6
10.010
7
10.030
8
9.987
9
10.010

 

Max
10.050
Min
9.887
Mean
10.019
3 Sigma
0.059

Online Ordering

Silicone Test Specimens are available online from the EMS Catalog. For ordering or product information, click here.