Rotary-Pumped Carbon and Sputter Coating System

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EMS 150R Plus Rotary Pumped Coater

The EMS 150R Plus is suitable for use with Tungsten/LaB₆ SEM and Benchtop SEM.

Typical uses

Sputter coating of noble metals using the EMS 150R S Plus & EMS 150R ES Plus

Recommended for magnifications:

• Up to x 50k using Au, Au/Pd
• Up to x 100k using Pt (optional)

Carbon cord coating for elemental analysis using the EMS 150R S Plus & EMS 150R ES Plus.

Key Features

• Capable of achieving vacuum of 2 x 10^-3 mbar
• New touch and swipe capacitive screen
• USB port for upgrades and download of log files
• Multiple-user profiles can be set up on one machine
• New software sorts recipes per user, according to recent use
• 16GB of memory can store more than 1000 recipes
• New multi-color LED visual status indicator
• Interchangeable stage options and plug-in heads

Product Description

The EMS 150R Plus is available in three configurations:

• EMS 150R S Plus – An automatic sputter coater for non-oxidizing metals. Available sputtering targets including gold, gold/palladium and platinum.
• EMS 150R E Plus – An automatic carbon cord coater for SEM applications such as EDS and WDS.
• EMS 150R ES Plus – A combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.

Recommended applications for EMS 150R Plus

• Low and medium magnifications
• SE signal boost (1nm or less)
• Table-top SEM coating
• Elemental analysis
• Copper metallization layers

These products are for Research Use Only.

Improved interface

• Capacitive touch screen is more sensitive for ease of use
• User interface software has been extensively revised, using a modern smartphone-style interface
• Comprehensive context-sensitive help screen
• USB interface allows easy software updates and backing up/copying of recipe files to USB stick
• Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
• 16GB of flash memory can store more than 1000 recipes
• Dual-core ARM processor for a fast, responsive display

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Automatic, controlled pulsed carbon cord evaporation

The carbon evaporation process can be terminated using the optional film thickness monitor, which incorporates a quartz crystal monitor, fitted as standard on E and ES models. This recipe ensures that carbon is evaporated in short controlled pulses, which has two effects: protecting the sample from heating and ensuring the accuracy of the film thickness monitor. Pulsing also significantly reduces the amount of debris (including large carbon fragments) associated with traditional carbon "flash" evaporation. Pulsed and ramped carbon rod recipes are supplied as standard.

Cool Magnetron Sputtering

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The EMS 150R Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

The EMS 150R S Plus and EMS 150R ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter non-oxidizing (noble) metals – ideal for W-SEM applications. The EMS 150R S Plus and EMS 150R ES Plus are fitted as standard with a gold (Au) sputter target.

Other targets options include Au/Pd, Pt/Pd, Pd, and Cu. Platinum (Pt) can also be sputtered with the optional Pt coating vacuum hose assembly.

Interchangeable Plug-in Heads

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process.

Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.

Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples.

Multiple stage options

The EMS 150R Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage). Some examples:

• Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.
• Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.
• Variable angle, rotary planetary stage for heavily contoured samples
• Large flat rotation stage with offset gear box for 4"/100 mm wafers
• Rotation stage for glass microscope slides

Other options are available on request.

Safety

The EMS 150R Plus meets key industry CE standards:

• All electronic components are protected by covers
• Implosion guard prevents user injury in event of chamber failure
• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened
• Electrical interlocks remove power when source head cover opened
• Overheating protection shuts down power supply

Specifications

Instrument Case	585 mm W x 470 mm D x 410 mm H Total height with coating head open is 650 mm
Weight	28.4 kg (Packed 42 kg)
Packed dimensions	725 mm W x 660 mm D x 680 mm H
Work Chamber	Borosilicate glass 150 mm ID x 127 mm H
Display	115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
User Interface	Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target	Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only
Specimen Stage	50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.

Vacuum

Rotary pump	Optional 5 m3/hr two-stage rotary pump with oil mist filter (order separately)
Vacuum measurement	Pirani gauge
Ultimate vacuum	2 x 10-2 mbar Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping with dry nitrogen gas
Sputter vacuum range	Between 7 x 10-3 and 1 x 10-1 mbar for gold

Processes

Sputtering	Sputter current 0-80 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods).
Carbon evaporation	A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from cord sources. Current pulse: 1-70 A current.

Visual status indicator

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

• Initialization
• Process running
• Idle
• Coating in progress
• Process completed
• Process ended in fault condition

Audio indication also sounds on completion of the process.

Ordering Information

EMS 150R S Plus

4500

EMS 150R S Plus Fully automatic, capacitive touch-screen controlled rotary-pumped sputter coater with status LED indicator. Including quick-release sputter insert, one 57 mm diameter x 0.1 mm gold target, and 50 mm diameter rotating specimen stage.

POR

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EMS 150R E Plus

4503

EMS 150R E Plus Fully automatic, capacitive touch-screen controlled rotary pumped carbon fiber evaporation coater with status LED indicator. Including quick-release carbon fiber insert for evaporation of carbon cord, carbon fiber cord, and 50 mm diameter rotating specimen stage.

POR

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EMS 150R ES Plus

4507

EMS 150R ES Plus Fully automatic, capacitive touch-screen controlled rotary pumped sputter coater and carbon evaporator with status LED indicator. Including quick release sputter insert, one 57 mm diameter x 0.1 mm gold target, and carbon fiber evaporation coater, including quick-release carbon fiber insert for evaporation of carbon cord*, and 50 mm diameter rotating specimen stage. *Coating inserts are interchangeable and can be swapped in seconds. The intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.

POR

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Options and Accessories

Rotary pump requirements – order separately

91003

5m3 hr two-stage Pfeiffer Duo 6 rotary pump with oil mist filter

POR

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Head inserts and glow discharge

4511	Additional sputter insert for quick metal change (R E and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased	POR	Quote
4512	Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod	POR	Quote
4513	Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted	POR	Quote
4514	Additional standard glass chamber assembly	POR	Quote
4515	Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens	POR	Quote
4516	Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS 150R Plus when bench depth is limited	POR	Quote
4517	Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited	POR	Quote
4518	Spare quartz crystal	95.00	Add to Cart
13530	Standard coating shield assembly	POR	Quote
11880	Extended height coating shield assembly	POR	Quote
1371	Platinum coating vacuum hose assembly	POR	Quote

Specimen stages

All rotating stages have variable rotation of between 8 and 20 rpm.

4519	50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4520	90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm	POR	Quote
4521	Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4522	Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm	POR	Quote
23850	Tilt stage sub-assembly 4"	POR	Quote

Carbon Supplies

4538	Carbon fiber cord – high purity – 1m	POR	Quote
4539	Carbon fiber cord – high purity – 5m	POR	Quote
4540	Carbon fiber cord – standard grade – 1m	POR	Quote
4541	Carbon fiber cord – standard grade – 10m	POR	Quote
4542	Carbon fiber cord – standard grade – 100m	POR	Quote
4543	Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10	POR	Quote
4544	Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10)	POR	Quote
4546	Manual rod shaper for 3.05 mm Ø carbon rods	POR	Quote
12097	Wedge Tool	POR	Add to Cart

Sputtering Targets

4523	57 mm Ø x 0.1 mm Gold	POR	Quote
4524	57 mm Ø x 0.2 mm Gold	POR	Quote
4525	57 mm Ø x 0.3 mm Gold	POR	Quote
4526	57 mm Ø x 0.1 mm Gold/Palladium (80/20)	POR	Quote
4527	57 mm Ø x 0.2 mm Gold/Palladium (80/20)	POR	Quote
4528	57 mm Ø x 0.3 mm Gold/Palladium (80/20)	POR	Quote
4529	57 mm Ø x 0.1 mm Platinum	POR	Quote
4530	57 mm Ø x 0.2 mm Platinum	POR	Quote
4531	57 mm Ø x 0.3 mm Platinum	POR	Quote
4532	57 mm Ø x 0.1 mm Nickel	POR	Quote
4533	57 mm Ø x 0.1 mm Silver	POR	Quote
4534	57 mm Ø x 0.1 mm Palladium	POR	Quote
4535	57 mm Ø x 0.1 mm Copper	POR	Quote
4536	57 mm Ø x 0.1 mm Platinum/Palladium (80/20)	POR	Quote
4537	57 mm Ø x 0.3 mm Platinum/Palladium (80/20)	POR	Quote

Spare kits

4547	Two-year spares kit for EMS 150R S Plus Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings	POR	Quote
4548	Two-year spares kit for EMS 150R E Plus Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote
4549	Two-year spares kit for EMS 150R ES Plus Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote

SEM/TEM Carbon Coaters Techniques and Applications
Sputter Coater Principles
Silver as a Removable Coating for Scanning Electron Microscopy

Turbo-Pumped Sputter and Carbon Coater