Rotary-Pumped Carbon and Sputter Coating System

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EMS Series of Rotary-Pumped Modular Coating Systems

The EMS150R is a compact rotary-pumped coating system suitable for SEM sputtering with non-oxidizing (noble) metals – e.g. gold (Au), gold/palladium (Au/Pd) and platinum (Pt) – and for carbon coating SEM specimens for EDS and WDS.

The EMS150R is available in three formats: sputtering (EMS150R S), carbon fiber coating (EMS150R E) and a combined sputtering and carbon fiber coating system (EMS150R ES).

Key Features

• Metal sputtering or carbon coating, or both – in one space saving format
• Rotary-Pumped sputter coating – allows sputtering of a range of non-oxidizing (noble) metals (e.g. Au, Pt, Ag and Pd)
• Carbon fiber coating – ideal for SEM carbon coating applications (EDS and WDS)
• Controlled pulse carbon cord evaporation – precise control, reduced carbon debris
• Precise thickness control using the film thickness monitor option
• Fully automatic touch screen control – rapid data input, simple operation
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• Three-year warranty

Product Description

Ideal for W-SEM sputtering and carbon coating applications

The EMS150R is a Rotary-Pumped coater available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS150R can be a sputter coater for scanning electron microscopy (SEM), a carbon coater suitable for SEM (e.g. EDS and WDS), or both in a single, easy-to-use system.

Note: For field emission (FE) SEM and for TEM-quality carbon coating, please use the turbo-molecular pumped EMS150T.

Molded case with color touch-screen

The EMS150R is presented in a custom-molded, one-piece case which allows easy access for servicing. The embedded, color touch screen allows multiple users to input and store coating 'recipes'. The case houses all the working components, including an automatic bleed control that ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an internal diameter of 150 mm/6" and comes with an integral implosion (safety) guard.

A variable-speed rotary specimen stage is fitted as standard, with other stages available as options. For further details, see Additional Information.

Sputter coating, carbon coating – or both

The EMS150R is available in three formats, each with a range of optional accessories:

• EMS150R S – A rotary-pumped sputter coater for non-oxidizing (noble) metals. A gold (Au) target is fitted as standard, with other metals – such as gold/palladium (Au/Pd) and platinum (Pt) – available as options.

• EMS150R E – A compact rotary-pumped carbon fiber coater, suitable for W-SEM EDS and WDS applications. Fitted as standard with a carbon fiber evaporation head insert, an optional carbon rod insert is also available.

• EMS150R ES – A combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

All models can be fitted with a range of optional accessories (a carbon rod coating insert, film thickness monitor, glow discharge, etc.). See Additional Information for more details.

Platinium sputtering

Please note that for sputtering platinium (Pt), the optional Pt coating vacuum hose assembly is required.

Controlled pulse carbon cord evaporation

Installed as standard on E and ES models, controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces or eliminates the amount of debris (large carbon fragments) associated with traditional carbon "flash" evaporation. Plus it allows carbon cord evaporation to be accurately controlled using the optional film thickness monitor (FTM) accessory.

Rapid data entry

At the operational heart of EMS150R is a simple color touch screen, which allows the most inexperienced or occasional operators to rapidly enter and store their own process data. For convenience, a number of typical sputtering and carbon coating profiles are already stored.

Maintenance

The intuitive touch screen interface features maintenance prompts which highlights time of the last clean, coating time since last clean, system 'on time', and time of the last service.

Pumping requirement

A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m³/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. See Ordering Information for more details.

Options and Accessories

The EMS150R has an extensive range of options and accessories, including a glow discharge insert, film thickness monitor (FTM) and specimens stages to suit most applications. For details, see Additional Information.

Glow Discharge Attachment

The primary application of glow discharge is as a technique for the surface modification (wetting) of newly evaporated transmission electron microscopy (TEM) carbon support films.

Hydrophilization

Freshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, allowing easy spreading of aqueous suspensions.

With subsequent magnesium acetate treatment, the surface is made hydrophilic and positively charged. In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional absorption of selected biomolecules.

Coating head options

A range of interchangeable, plug-in style coating head inserts are available:

Sputtering head insert. Suitable for oxidizing (noble) metals. Supplied with a 57 mm Ø x 0.1 mm thick gold (Au) target as standard. For additional targets, see Ordering Information.

Additional sputter head insert. Available for quick coating material change (RS and RES versions only).

Carbon rod evaporation head insert (for 3.05 mm Ø rods).

Carbon fiber evaporation head insert.

Specimen stages

The EMS150R has specimen stages to meet most requirements. All are easy-to-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage):

Rotation stage. 50 mm Ø (fitted as standard). This stage only rotates – no tilt or height adjustment.

Rotate-tilt stage. 50 mm Ø with height adjustment (target-to-stage height variable between 37 mm and 60 mm). The tilt angle can be preset.

Variable angle rotary planetary stage with 50 mm Ø specimen platform.

Large flat rotation stage for 4"/100 mm wafers.

Rotation stage for glass microscope slides.

Other options

Extended height chamber for tall specimens – for use with tall specimens and with Rotacota stage.

Film Thickness Monitor (FTM). The optional 4517 consists of a controller and quartz crystal oscillator built into the EMS150R, and a vacuum feed through, chamber-mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, its frequency of oscillation is modified. This modification is used to measure and control the thickness of metal film.

Specifications

General

Instrument case	585 mm W x 470 mm D x 410 mm H, total height with coating head open is 650 mm
Weight	28.4 kg
Packed dimensions	725 mm W x 660 mm D x 680 mm H (37 kg)
Work chamber	Borosilicate glass 152 mm ID x 127 mm H
Safety shield	Integral polyethylene terephthalate (PET) cylinder
Display	145 mm 320 mm x 240 mm color graphic thin film transistor (TFT) display
User Interface	Intuitive full graphical interface with touch screen buttons; includes features such as a log of the last 10 coatings carried out and reminders for when maintenance is due.
Sputtering targets	Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only

Vacuum

Rotary pump	5m3/hr two-stage rotary pump with oil mist filter (order separately: 91003)
Vacuum measurement	Pirani gauge
Typical ultimate vacuum	2 x 10-2mbar in a clean system after pre-pumping with dry nitrogen gas
Specimen stage	60 mm Ø rotation stage with with rotation speed of 8-20 rpm. For alternative stages, see Ordering Information.

Processes

Sputtering	0-80 mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without breaking vacuum and with automatically built-in rest periods).
Carbon evaporation	A robust, ripple free DC power supply, featuring pulse evaporation, ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-70 A.

Services and other information

Gases	Argon sputtering process gas, 99.999% (RS and RES versions). Nitrogen venting gas (optional)
Electrical supply	90-250 V 50/60 Hz 1,400 VA including rotary pump. 110/240 V voltage selectable.
Conformity	Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, resulting in reduced running costs

Ordering Information

EMS150R S

4500	EMS150R S Rotary-Pumped sputter coater, includes an 57 mm Ø x 0.1 mm gold target	POR	Quote
4501	Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidizing (noble) metals. Supplied with A 57 mm Ø x 0.1 mm thick gold target as standard. For additional noble metal targets (e.g. Platinum, Gold / Palladium, Silver) see Sputtering Targets section		Included
4502	Rotation stage, 50 mm Ø with adjustable height for target to sample distances of 38 mm-79 mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

EMS150R E

4503	EMS150R E Rotary-Pumped carbon fiber evaporator, supplied with carbon fiber / cord	POR	Quote
4504	Quick-release carbon fiber evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fiber and carbon cord		Included
4506	Rotation stage, 50 mm Ø with adjustable height for target to sample distances of 38 mm-79 mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

EMS150R ES

4507	EMS150R ES Rotary-Pumped sputter coater, includes an 57 mm Ø x 0.1 mm gold target, and carbon fiber evaporator, supplied with carbon fiber / cord	POR	Quote
4508	Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidizing (noble) metals. Supplied 57 mm Ø x 0.1 mm thick gold target as standard. For additional noble metal targets (e.g. Platinum, Gold / Palladium, Silver) see Sputtering Targets section		Included
4509	Quick-release carbon fiber evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fiber and carbon cord		Included
4510	Rotation stage, 50 mm Ø with adjustable height for target to sample distances of 38 mm-79 mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

Options and Accessories

A range of interchangeable, plug-in style coating inserts are available:

4511	Additional sputter insert for quick metal change (R S and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased	POR	Quote
4512	Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod	POR	Quote
4513	Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted	POR	Quote
4514	Additional standard glass chamber assembly	POR	Quote
4515	Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens	POR	Quote
4516	Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the ems150R when bench depth is limited	POR	Quote
4517	Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited	POR	Quote
4518	Spare quartz crystal	95.00	Add to Cart

Specimen stages

The EMS150R has alternative specimen stages to meet most requirements. All are easy-change, drop-in style and are height adjustable (except 10360 rotary planetary stage)

4519	50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4520	90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm	POR	Quote
4521	Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4522	Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm	POR	Quote

Carbon Supplies

4538	Carbon fiber cord – high purity – 1m	POR	Quote
4539	Carbon fiber cord – high purity – 5m	POR	Quote
4540	Carbon fiber cord – standard grade – 1m	POR	Quote
4541	Carbon fiber cord – standard grade – 10m	POR	Quote
4542	Carbon fiber cord – standard grade – 100m	POR	Quote
4543	Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10	POR	Quote
4544	Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10)	POR	Quote
4546	Manual rod shaper for 3.05 mm Ø carbon rods	POR	Quote

Sputtering Targets

4523	57 mm Ø x 0.1 mm Gold	POR	Quote
4524	57 mm Ø x 0.2 mm Gold	POR	Quote
4525	57 mm Ø x 0.3 mm Gold	POR	Quote
4526	57 mm Ø x 0.1 mm Gold/Palladium (80/20)	POR	Quote
4527	57 mm Ø x 0.2 mm Gold/Palladium (80/20)	POR	Quote
4528	57 mm Ø x 0.3 mm Gold/Palladium (80/20)	POR	Quote
4529	57 mm Ø x 0.1 mm Platinum	POR	Quote
4530	57 mm Ø x 0.2 mm Platinum	POR	Quote
4531	57 mm Ø x 0.3 mm Platinum	POR	Quote
4532	57 mm Ø x 0.1 mm Nickel	POR	Quote
4533	57 mm Ø x 0.1 mm Silver	POR	Quote
4534	57 mm Ø x 0.1 mm Palladium	POR	Quote
4535	57 mm Ø x 0.1 mm Copper	POR	Quote
4536	57 mm Ø x 0.1 mm Platinum/Palladium (80/20)	POR	Quote
4537	57 mm Ø x 0.3 mm Platinum/Palladium (80/20)	POR	Quote

Spare kits

4547	Two-year spares kit for EMS150R S Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings	POR	Quote
4548	Two-year spares kit for EMS150R E Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote
4549	Two-year spares kit for EMS150R ES Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote

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Silver as a Removable Coating for Scanning Electron Microscopy

Turbo-Pumped Sputter and Carbon Coater